Cleanroom Metrology Controller Purpose The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality. Capabilities - CD-SEM measurement recipes - Spectroscopic ellipsometry analysis - Film thickness mapping - Surface profilometry - Defect inspection - Overlay measurement Usage Guidelines Metrology Control 1. CD-SEM Measurements - Develop automated recipes - Calibrate against reference - Track process variation 2. Ellipsometry - Sele…