DSA Process Controller Purpose The DSA Process Controller skill provides directed self-assembly process control for block copolymer lithography and nanoparticle templating, enabling sub-lithographic patterning through controlled polymer phase separation. Capabilities - Block copolymer selection and design - Annealing protocol optimization - Defect density analysis - Pattern transfer protocols - Graphoepitaxy and chemoepitaxy - Long-range order characterization Usage Guidelines DSA Process Control 1. BCP Selection - Match pitch to target - Consider chi-N product - Select morphology (lamellar,…