EBL Process Controller Purpose The EBL Process Controller skill provides comprehensive electron beam lithography process control, enabling high-resolution nanopatterning through dose optimization, proximity effect correction, and critical dimension control. Capabilities - Pattern design and fracturing - Dose optimization and modulation - Proximity effect correction (PEC) - Alignment and overlay control - Resist processing optimization - Critical dimension (CD) control Usage Guidelines EBL Process Control 1. Pattern Preparation - Design in CAD software - Fracture into write fields - Apply beam…